CAJ | 학술논문

利用三维电磁场仿真软件对线-芯结构微型正交激励磁通门进行了仿真分析。研究了不同频率下激励线宽度、铁芯宽度、激励线厚度、铁芯厚度等磁通门结构参数对铁芯饱和情况的影响。以减小激励电流、降低磁通门功耗为目标，讨论了采用线-芯结构的微型正交激励磁通门所应选择的结构尺寸。采用MEMS（ Micro-Electro-Mechanical System)工艺制备了这种结构尺寸的微型磁通门传感器并对其进行了测试，采用尖脉冲激励时，其可以以1．7 mW的超低功耗得到91．6 V/T的输出灵敏度。
이용삼유전자장방진연건대선-심결구미형정교격려자통문진행료방진분석。연구료불동빈솔하격려선관도、철심관도、격려선후도、철심후도등자통문결구삼수대철심포화정황적영향。이감소격려전류、강저자통문공모위목표，토론료채용선-심결구적미형정교격려자통문소응선택적결구척촌。채용MEMS（ Micro-Electro-Mechanical System)공예제비료저충결구척촌적미형자통문전감기병대기진행료측시，채용첨맥충격려시，기가이이1．7 mW적초저공모득도91．6 V/T적수출령민도。
In this paper, orthogonal micro-fluxgates with wire-core structure were simulated and anlysed by three-dimensional electromagnetic simulation software. The influence of the structure parameters like the width of excitation wire,the width of core, the thickness of excitation wire, the thickness of core on core saturation condition were investigated at different excitation frequency. Reducing excitation current and enhancing sensitivity were taken as the target,then the structure of orthogonal micro-fluxgates with wire-core structure were optimized. The optimized orthogonal micro-fluxgate was fabricated based on MEMS ( Micro-Electro-Mechanical System ) technology. When the sensor was excited by pulse current,91. 6 V/T sensitivity can be obtained with ultra low power consumption of 1. 9 mW.