CAJ | 학술논문

设计了一种新型差分式大量程MEMS加速度计,实现了面内大过载信号的测试。首先利用MATLAB软件结合理论原理,设计了具体的结构参数,利用ANSYS有限元分析软件验证了结构设计的合理性。将本差分式MEMS面内加速度计结构用于集成三轴传感器,3个敏感质量块可以分别感应3个方向的加速度而不会相互影响,可以有效解决传感器体积大以及轴间交叉干扰的难题。
설계료일충신형차분식대량정MEMS가속도계,실현료면내대과재신호적측시。수선이용MATLAB연건결합이론원리,설계료구체적결구삼수,이용ANSYS유한원분석연건험증료결구설계적합이성。장본차분식MEMS면내가속도계결구용우집성삼축전감기,3개민감질량괴가이분별감응3개방향적가속도이불회상호영향,가이유효해결전감기체적대이급축간교차간우적난제。
A new kind of large range MEMS accelerometer, which can measure high overload was designed. The structural parameters were calculated by MATLAB,and the reliability of the structure was verified by ANSYS. This kind of MEMS accelerometer can be used on triaxial accelerometer device,with the advantage of mutual isolation. This can effectively solve the problem of big volume and Cross-interference between the axes.