CAJ | 학술논문

实验研究了无光照情况下多孔硅制备中不同单羟基正醇对形貌的影响。实验结果表明，随着醇碳链的增长，多孔硅孔密度减小，枝杈变长，枝杈的尖端变得尖锐。在孔的生长过程中，十字枝杈首先沿着晶格方向快速生长，然后晶格方向的生长速率减小，而非晶格方向则持续生长直到空穴耗尽。本实验增进了对硅溶解动力学中醇作用机理的理解。
실험연구료무광조정황하다공규제비중불동단간기정순대형모적영향。실험결과표명，수착순탄련적증장，다공규공밀도감소，지차변장，지차적첨단변득첨예。재공적생장과정중，십자지차수선연착정격방향쾌속생장，연후정격방향적생장속솔감소，이비정격방향칙지속생장직도공혈모진。본실험증진료대규용해동역학중순작용궤리적리해。
Several-Porous-Silicon(PS)-films-with-macropores-are-fabricated-by-electrochemical-etching-method-with-different-monohydric-alcohol-additives-without-the-help-of-illumination.-The-morphologies-of-PS-films-are-investigated-systematically.-Experimental-results-show-that-as-the-increase-of-the-order-of-alcohols,-the-pore-size-of-the-PS-increases,-the-pore-density-decreases,-and-the-tip-of-crossed-pore-becomes-sharper.-The-etching-speed-is-fast-in-the-direction-of-lattice-orientation-at-the-beginning,-but-it-gradually-slows-down-in-the-etching-process.-While-the-etching-in-the-direction-of-amorphous-orientation-keeps-constant,-as-a-result,-the-pore-shape-is-crossed-at-the-beginning-and-it-is-gradually-plumped-until-the-holes-exhausted.-The-experimental-results-obtained-in-this-study-highlight-the-role-of-alcohols-in-the-dissolution-kinetics-of-the-silicon,-which-has-a-direct-impact-on-the-pore-growth-process.