CAJ | 학술논문

给出了薄膜气敏材料性能的测试结果：存在最佳灵敏度膜厚l *（ l *≈1500?）；动态特性；膜越薄响应越快；存在最佳掺杂（ CeO2）量x%，x的取值范围为5~15。提出了复合绝缘膜Si/SiO2/Al2 O3衬底；提出了研制薄膜的粉末溅射；给出了研制电导气敏薄膜元件的工艺流程，并对各工艺进行了必要的说明。
급출료박막기민재료성능적측시결과：존재최가령민도막후l *（ l *≈1500?）；동태특성；막월박향응월쾌；존재최가참잡（ CeO2）량x%，x적취치범위위5~15。제출료복합절연막Si/SiO2/Al2 O3츤저；제출료연제박막적분말천사；급출료연제전도기민박막원건적공예류정，병대각공예진행료필요적설명。
The tested results of thin films was given;There exists optimum sensitivity film thickness l *( l *≈1500 ?);The dynamical property;Film thin,response quick;There exists optimum doping( CeO2 ) concentration x% ,x:5~15. Composite insulator film Si/SiO2/Al2 O3 as substrate and powder sputtered process for making thin film is presented. The technical processes of conductance thin film gas sensor is also given.