CAJ | 학술논문

指出了薄膜元件能否实用化的关键在气敏层的稳定性；提出了粉末溅射和高能溅射是气敏层稳定性的保证。指出了能实用化的薄膜元件是否能生产还要有较高的成品率，这就要求对晶体管光刻工艺进行改造和发展。给出了SnO2/16%CeO2，ZnO/1%CeO2，Fe2 O3/2%CeO2，TiO2/2%CeO2，ZnSnO3（ ZnO +SnO2）元件的气敏特性。
지출료박막원건능부실용화적관건재기민층적은정성；제출료분말천사화고능천사시기민층은정성적보증。지출료능실용화적박막원건시부능생산환요유교고적성품솔，저취요구대정체관광각공예진행개조화발전。급출료SnO2/16%CeO2，ZnO/1%CeO2，Fe2 O3/2%CeO2，TiO2/2%CeO2，ZnSnO3（ ZnO +SnO2）원건적기민특성。
It suggests that the stability of gas sensing film is the key to get applicable thin film sensor;and it puts forward that powder sput-tered and high energy sputtered process may assure the stability. High yield is required to produce the applicable thin film sensor and it needs to improve and develop transistor lithography process. The gas sensing property of SnO2/16%CeO2 ,ZnO/1%CeO2 ,Fe2 O3/2%CeO2 ,TiO2/2%CeO2 ,ZnSnO3 ( ZnO+SnO2 )is given.