温度对半导体封装设备光学系统的影响
온도대반도체봉장설비광학계통적영향
The Thermal Effect of the Optical System in Semiconductor Equipment
  • 万方数据
    电子工业专用设备 전자공업전용설비
    EQUIPMENT FOR ELECTRONIC PRODUCTS MANUFACTURING
    2014年 4期 46-49 ,共4页

    于丽娜%蒋云龙%田志

    우려나%장운룡%전지

    温度%半导体设备%光学系统 溫度%半導體設備%光學繫統
    온도%반도체설비%광학계통
    Tem perature%Sem iconductorequipm ent%O pticalsystem
    分析了半导体设备温度变化对其光学系统的影响，以某半导体设备光学系统为例阐述并指出了此影响对生产造成的危害。
    분석료반도체설비온도변화대기광학계통적영향，이모반도체설비광학계통위례천술병지출료차영향대생산조성적위해。
    In this thesis,the effect of tem perature variation with sem iconductor equipm ent for optical system was analyzed. M eanwhile,interrelated exam ple of optical system in sem iconductor equipm ent was expatiated.A nd then,the induced dam age for m anufacture with itwas layout.
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