传感器与微系统
傳感器與微繫統
전감기여미계통
TRANSDUCER AND MICROSYSTEM TECHNOLOGY
2014年
8期
76-79
,共4页
刘晓东%顾小稳%班炯%陈靖宇%章晓明
劉曉東%顧小穩%班炯%陳靖宇%章曉明
류효동%고소은%반형%진정우%장효명
三维力矩传感器%力矩耦合%高灵敏度%静态性能好
三維力矩傳感器%力矩耦閤%高靈敏度%靜態性能好
삼유력구전감기%력구우합%고령민도%정태성능호
three-dimensional torque sensor%torque coupling%high sensitivity%good static performance
为测量三维力矩并解决维间耦合问题,设计了一种测量微小力矩的电阻应变式传感器。分析了传感器电阻应变计组桥方案抑制维间力矩耦合的原理。通过有限元方法仿真计算出节点应变,实现传感器高灵敏度的目标。通过传感器静态标定实验得到了标定解耦矩阵,解决了由于加工误差和应变计粘贴误差带来的力矩耦合问题。实验表明:此传感器具有好的静态性能,线性度都控制在1%之内,迟滞误差也控制在0.12%以下。
為測量三維力矩併解決維間耦閤問題,設計瞭一種測量微小力矩的電阻應變式傳感器。分析瞭傳感器電阻應變計組橋方案抑製維間力矩耦閤的原理。通過有限元方法倣真計算齣節點應變,實現傳感器高靈敏度的目標。通過傳感器靜態標定實驗得到瞭標定解耦矩陣,解決瞭由于加工誤差和應變計粘貼誤差帶來的力矩耦閤問題。實驗錶明:此傳感器具有好的靜態性能,線性度都控製在1%之內,遲滯誤差也控製在0.12%以下。
위측량삼유력구병해결유간우합문제,설계료일충측량미소력구적전조응변식전감기。분석료전감기전조응변계조교방안억제유간력구우합적원리。통과유한원방법방진계산출절점응변,실현전감기고령민도적목표。통과전감기정태표정실험득도료표정해우구진,해결료유우가공오차화응변계점첩오차대래적력구우합문제。실험표명:차전감기구유호적정태성능,선성도도공제재1%지내,지체오차야공제재0.12%이하。
To measure 3D torque and solve problem of coupling between two dimensional,a resistive strain sensor for small torque measuring is designed. The mechanism which curbs the dimension coupling is analyzed by the scheme of bridges of the sensor resistance strain gauge. Nodes strain is calculated by finite element method to achieve the goal of high sensitivity. Through static calibration experiment of sensor,calibration decoupling matrix is obtained and the problem of torque coupling due to processing error and strain gauge paste error is solved. Experimental results show that the sensor has good static performance,and linearity is controlled within 1% and hysteresis error is below 0. 12%.