传感器与微系统
傳感器與微繫統
전감기여미계통
TRANSDUCER AND MICROSYSTEM TECHNOLOGY
2014年
8期
87-89,93
,共4页
速度分布%传感器优化%多电极静电传感器%有效相关计算
速度分佈%傳感器優化%多電極靜電傳感器%有效相關計算
속도분포%전감기우화%다전겁정전전감기%유효상관계산
velocity distribution%sensor optimization%multi-electrode electrostatic sensor%effective correlation calculation
通过介绍静电相关速度分布测量原理,说明实现不同侧电极静电信号有效相关计算的重要性。为保证不同侧相关有效性,对多电极静电传感器进行有效相关分析,提出有效相关分析方法,进行多电极静电传感器结构优化。最后经过实验验证,优化后的多电极静电传感器不同侧电极静电信号能够实现有效的相关计算,为进一步研究速度分布的测量奠定了基础。
通過介紹靜電相關速度分佈測量原理,說明實現不同側電極靜電信號有效相關計算的重要性。為保證不同側相關有效性,對多電極靜電傳感器進行有效相關分析,提齣有效相關分析方法,進行多電極靜電傳感器結構優化。最後經過實驗驗證,優化後的多電極靜電傳感器不同側電極靜電信號能夠實現有效的相關計算,為進一步研究速度分佈的測量奠定瞭基礎。
통과개소정전상관속도분포측량원리,설명실현불동측전겁정전신호유효상관계산적중요성。위보증불동측상관유효성,대다전겁정전전감기진행유효상관분석,제출유효상관분석방법,진행다전겁정전전감기결구우화。최후경과실험험증,우화후적다전겁정전전감기불동측전겁정전신호능구실현유효적상관계산,위진일보연구속도분포적측량전정료기출。
By introducing principle of electrostatic correlation based velocity distribution measurement,importance of effective correlation calculation by non-corresponding side electrode couples is emphasized. In order to ensure its effectiveness,effective correlation analysis on multi-electrode electrostatic sensor is carried out,and effective correlation analysis method is proposed,according to this,the structure of multi-electrode electrostatic sensor is optimized. Finally,through experimental verification,it show that correlation calculation of non-corresponding side electrode couples can be realized effectively by the optimized multi-electrode electrostatic sensor,which lays a foundation for further research on velocity distribution measurement.