CAJ | 학술논문

由于超磁致伸缩高频微泵的普通输出杆与泵腔内壁频繁摩擦产生的损耗，影响泵腔的密封性，从而导致油液泄漏。为解决这一问题，提出一种复合型柔性铰链薄膜取代普通输出杆，并对各种柔性铰链薄膜进行有限元建模及分析，由仿真结果和理论分析得出：该复合型柔性铰链薄膜转动能力强，回转精度高，结构尺寸小，运动灵敏度高，从而减小柔性铰链薄膜与泵腔内壁的摩擦，为以后GMM微泵的设计提供理论基础。
유우초자치신축고빈미빙적보통수출간여빙강내벽빈번마찰산생적손모，영향빙강적밀봉성，종이도치유액설루。위해결저일문제，제출일충복합형유성교련박막취대보통수출간，병대각충유성교련박막진행유한원건모급분석，유방진결과화이론분석득출：해복합형유성교련박막전동능력강，회전정도고，결구척촌소，운동령민도고，종이감소유성교련박막여빙강내벽적마찰，위이후GMM미빙적설계제공이론기출。
As the friction loss which caused by rubbing frequently between the common output rod of GMM micro-pump and pump cavity wall,affected the sealing of the pump cavity,thus oil leakage is led. In order to solve this problem,a method that a kind of composite flexure hinge replaced of the common output rod is put forward. Finite element modeling and analysis (FEM &FEA)on all kinds of flexure hinge output film were taken. By the result of simulation and theoretical analysis,this composite flexure hinge film has stronger rotation capacity,higher rotation precision,smaller dimension and higher movement sensitivity,thereby reduces the fric-tion between the flexure hinge output film and pump cavity wall. So it can provide theoretical basis for the future design of GMM micro-pump.