CAJ | 학술논문

为了实现复杂光学曲面的研抛加工，自行研制了一台转摆联动的五轴超精密研抛机床，并对其关键组成机构---转摆联动装置进行了优化设计。利用ANSYS Workbench软件对摆台的静力学特性进行了分析；同时以滑块位姿变化过程中摆台变形最小为优化目标，对摆台做了结构优化。基于动力学分析方法对气浮转台进行合理简化，利用ABAQUS对转台的转动部分模态分析。结果表明：优化后的机构在满足承重情况下的最大变形量明显减小，能够满足精密研抛加工的要求。
위료실현복잡광학곡면적연포가공，자행연제료일태전파련동적오축초정밀연포궤상，병대기관건조성궤구---전파련동장치진행료우화설계。이용ANSYS Workbench연건대파태적정역학특성진행료분석；동시이활괴위자변화과정중파태변형최소위우화목표，대파태주료결구우화。기우동역학분석방법대기부전태진행합리간화，이용ABAQUS대전태적전동부분모태분석。결과표명：우화후적궤구재만족승중정황하적최대변형량명현감소，능구만족정밀연포가공적요구。
In order to polishing the complex optical surfaces,a five-axis ultra-precise polishing machine with joint movement of rotary-swing was developed individually.The rotary-swing mechanism with joint movement as its key component was optimized in de-sign.By using ANSYS Workbench software,the statics characteristic of the precise swing stage was analyzed;at the same time,the structure of the swing sets was optimized with a target of the minimum distortion during the process of change position-posture of the sli-der.Based on kinetic analysis method,air bearing rotary stage was simplified reasonably,and modal analysis of the rotating part of turntable was performed by using ABAQUS.The results show that under this circumstance of meeting the bearing load,the optimized institution significantly reduces the amount of maximum deformation,which meets the requirements of precision polishing process.