CAJ | 학술논문

研究了热压法制作带有导能筋的新型凸凹微结构的成形特性。从理论出发对材料的本构关系及其温变特性进行了表征，通过对商用软件的二次开发实现了成形特性理论模型的应用，利用有限元法对带有导能筋的基片的热压过程进行仿真，分析了在压力受到严格限制的情况下热压温度以及保温保压时间对复制精度的影响，在此基础上优化了工艺参数。利用套刻法和各向异性湿法腐蚀技术制得所需的硅模具，进行了热压试验，试验结果验证了仿真结果的有效性。
연구료열압법제작대유도능근적신형철요미결구적성형특성。종이론출발대재료적본구관계급기온변특성진행료표정，통과대상용연건적이차개발실현료성형특성이론모형적응용，이용유한원법대대유도능근적기편적열압과정진행방진，분석료재압력수도엄격한제적정황하열압온도이급보온보압시간대복제정도적영향，재차기출상우화료공예삼수。이용투각법화각향이성습법부식기술제득소수적규모구，진행료열압시험，시험결과험증료방진결과적유효성。
Hot embossing process of the devices with both concave microchannel and convex micro energy director for ultrasonic bonding was researched.Based on the constitutive relation and tempera-ture-depending mechanical properties of the material,commercial software was redeveloped.FEM was employed to simulate the embossing processes with different embossing temperatures.The influences of temperature and holding time on replication accuracy was analyzed with strictly defined embossing force.And the processing parameters were optimized.A silicon mold fabricated by multi-step lithog-raphy technology and two times of wet-etching processes was used in the hot embossing experiment. The experiments agree well with the simulation results.