CAJ | 학술논문

高纯度四氟化硅（ SiF4）是电子工业中的一种重要原料，能用于光导纤维、太阳能电池和水泥硬化剂等的原料。详细介绍了SiF4气体中（ SiF3）2 O的生成原理和（ SiF3）2 O的净化方法，六氟二甲硅醚的纯化方法有活性炭吸附法，与含氟化氢的浓硫酸，氟气，氟化剂等物质发生反应，其中详细介绍了活性炭对四氟化硅气体中的杂质的净化效果。
고순도사불화규（ SiF4）시전자공업중적일충중요원료，능용우광도섬유、태양능전지화수니경화제등적원료。상세개소료SiF4기체중（ SiF3）2 O적생성원리화（ SiF3）2 O적정화방법，륙불이갑규미적순화방법유활성탄흡부법，여함불화경적농류산，불기，불화제등물질발생반응，기중상세개소료활성탄대사불화규기체중적잡질적정화효과。
Silicon tetrafluoride is an important raw material in electronic industry .It can also be used as raw material of optical fiber.solar cell and cement hardener.The generation principle of ( SiF3 ) 2 O from SiF4 gas are detailed described.The purification method of ( SiF3 ) 2 O mainly have activated carbon adsorption method.And with concentrated sulfuric acid containing hydrogen fluoride , fluorine gas and fluorinating agent reaction , The details of the purification effect of activated carbon on the four silicon fluoride impurities in gas.