长春师范大学学报(自然科学版)
長春師範大學學報(自然科學版)
장춘사범대학학보(자연과학판)
Journal of Changchun Normal University (Natural Science)
2014年
4期
29-32
,共4页
薄膜厚度%光学测量方法%实验教学
薄膜厚度%光學測量方法%實驗教學
박막후도%광학측량방법%실험교학
film thickness%the optical measurement method%experiment teaching
随着科技的进步和精密仪器的应用,薄膜厚度的测量方法层出不穷,准确测量薄膜的厚度和光学常数在薄膜的制备和应用中起着关键的作用,直接关系到该薄膜材料能否正常工作。本文通过对薄膜的光学测量方法进行归类,列举其中一些测量方法在教学中的应用。
隨著科技的進步和精密儀器的應用,薄膜厚度的測量方法層齣不窮,準確測量薄膜的厚度和光學常數在薄膜的製備和應用中起著關鍵的作用,直接關繫到該薄膜材料能否正常工作。本文通過對薄膜的光學測量方法進行歸類,列舉其中一些測量方法在教學中的應用。
수착과기적진보화정밀의기적응용,박막후도적측량방법층출불궁,준학측량박막적후도화광학상수재박막적제비화응용중기착관건적작용,직접관계도해박막재료능부정상공작。본문통과대박막적광학측량방법진행귀류,열거기중일사측량방법재교학중적응용。
Due to the advantages of new technology and precise instruments, a variety of approaches to measure film thickness has been developed. And it’s vital to measure film thickness and optical constants precisely for the preparation and application of the film, which has direct effect on normal work of it. Classified by optical measurement method on the film, the application of some measurement meth-od in teaching is illustrated.