CAJ | 학술논문

离子束加工过程中，由于热能的传递会导致光学元件内部产生热应力和热变形，影响加工精度，严重时甚至会导致光学元件的损坏。本文提出了一种新型的主、三镜一体化离子束加工方式。在一体化加工的基础上利用UG/TMG有限元分析软件，对无散热和铜带散热两种加工状态下的光学元件表面温度场的分布进行了仿真分析。对比结果数据可以看出铜带散热可以使加工过程中最高温度降低10℃。最后通过实际加工过程，对热分析进行了验证。
리자속가공과정중，유우열능적전체회도치광학원건내부산생열응력화열변형，영향가공정도，엄중시심지회도치광학원건적손배。본문제출료일충신형적주、삼경일체화리자속가공방식。재일체화가공적기출상이용UG/TMG유한원분석연건，대무산열화동대산열량충가공상태하적광학원건표면온도장적분포진행료방진분석。대비결과수거가이간출동대산열가이사가공과정중최고온도강저10℃。최후통과실제가공과정，대열분석진행료험증。
In ion beam process, due to the transfer of heat, the optical elements cause an internal thermal stress and thermal deformation which affect machining precision, and can even lead serious damage to the optical element. This paper presents a new ion beam integration processing method for main and third mirror. On the basis of integration method,use finite element analysis software UG/TMG to analysis and simulation optical element thermal distribution in two processing state which include no heat dissipation and cooper dissipation. Comparison with data which shows cooper heat dissipation reduce the maximum temperature during processing by 10℃. Finally,adopt of the actual process to ver-ify the thermal analysis.