CAJ | 학술논문

提出并分析了一种结构紧凑的截线型滤波器。该滤波器建立在一种硅基混合型表面等离激元波导结构上。与通常的混合等离激元结构相比，该波导结构在制作时只需对顶部的一层硅材料进行刻蚀，不需在光刻步骤进行对准和套刻，工艺简单易行。该截线滤波器由一截突柱波导与直波导耦合组成，并采用三维时域有限差分方法对其频谱响应进行模拟计算。计算结果表明该滤波器与现有文献中的二维金属-绝缘体-金属波导截线滤波器具有类似的频谱特性。另外，还进一步分析了截线部分及波导自身尺寸对器件输出频谱的影响。
제출병분석료일충결구긴주적절선형려파기。해려파기건립재일충규기혼합형표면등리격원파도결구상。여통상적혼합등리격원결구상비，해파도결구재제작시지수대정부적일층규재료진행각식，불수재광각보취진행대준화투각，공예간단역행。해절선려파기유일절돌주파도여직파도우합조성，병채용삼유시역유한차분방법대기빈보향응진행모의계산。계산결과표명해려파기여현유문헌중적이유금속-절연체-금속파도절선려파기구유유사적빈보특성。령외，환진일보분석료절선부분급파도자신척촌대기건수출빈보적영향。
An ultra-compact wavelength filter on silicon-based hybrid plasmonic waveguide is proposed and simula-ted. The present hybrid plasmonic structure needs only one layer to be patterned and is favorable for fabrication. The light is confined strongly in a thin silica dioxide layer between the metal substrate and silicon top layer. The filter con-sists of a stub structure coupled to a straight waveguide. The output spectra calculated by the 3D FDTD method are similar as those devices based on the 2D metal-insulator-metal waveguide structure in the previous literatures. In ad-dition, the effects of the dimensions of the stub and waveguide structure on the device's performance are analyzed.