浙江化工
浙江化工
절강화공
ZHEJIANG CHEMICAL INDUSTRY
2014年
8期
49-51
,共3页
王民涛%柴华%曾昌华%杨会娥
王民濤%柴華%曾昌華%楊會娥
왕민도%시화%증창화%양회아
六氟乙烷%傅里叶变换红外光谱(FTIR)%氯化氢%定量分析
六氟乙烷%傅裏葉變換紅外光譜(FTIR)%氯化氫%定量分析
륙불을완%부리협변환홍외광보(FTIR)%록화경%정량분석
hexafluoroethane%Fourier transform infrared spectroscopy(FTIR)%hydrogen chloride%quan-titative anaylsis
电子行业用作清洗和蚀刻的特种气体六氟乙烷对杂质组分HCl的含量要求严格控制在一定范围，本文建立了用傅里叶变换红外光谱仪分析其中HCl杂质的分析方法，并实现了对产品中HCl的定量分析。
電子行業用作清洗和蝕刻的特種氣體六氟乙烷對雜質組分HCl的含量要求嚴格控製在一定範圍，本文建立瞭用傅裏葉變換紅外光譜儀分析其中HCl雜質的分析方法，併實現瞭對產品中HCl的定量分析。
전자행업용작청세화식각적특충기체륙불을완대잡질조분HCl적함량요구엄격공제재일정범위，본문건립료용부리협변환홍외광보의분석기중HCl잡질적분석방법，병실현료대산품중HCl적정량분석。
As gaseous impurity, the content of hydrogen chloride must be strictly controlled within a cer-tain range to high-purified hexafluoroethane, which is used as cleaning and etching gas in electronic indus-try. In this paper, we set up a method to analyze the hydrogen chloride ’s content, and by the method, we achieved to do its’ quantitative analysis in product.
