CAJ | 학술논문

直线电机凭借其优异的传动性能在IC封装设备中被广泛应用，其定位精度直接影响设备的总体精度。为了提高直线电机定位精度，采用Agilent双频激光干涉仪对直线电机的定位精度进行测试。通过直线电机不同工况下的定位精度进行了测试，发现直线电机进给的速度、加速度的变化对定位精度的影响不大，且定位精度具有累计性。最后，根据功能要求采用分段补偿方法对直线电机定位精度进行误差补偿，试验结果表明该误差补偿方法简单易行。
직선전궤빙차기우이적전동성능재IC봉장설비중피엄범응용，기정위정도직접영향설비적총체정도。위료제고직선전궤정위정도，채용Agilent쌍빈격광간섭의대직선전궤적정위정도진행측시。통과직선전궤불동공황하적정위정도진행료측시，발현직선전궤진급적속도、가속도적변화대정위정도적영향불대，차정위정도구유루계성。최후，근거공능요구채용분단보상방법대직선전궤정위정도진행오차보상，시험결과표명해오차보상방법간단역행。
The linear motor is widely used in the IC packaging equipment with its excellent transmission per-formance and its positioning accuracy directly affects the overall accuracy of the device. To improve the po-sitioning accuracy of the linear motor, the Agilent laser interferometer is used to test the positioning accura-cy. By testing the positioning accuracy of liner motor under different conditions, the result shows that chan-ges of speed and acceleration for liner motor have little effect on positioning accuracy and positioning accura-cy are cumulative. Finally, according to the functional requirements, this dissertation adopts sub-compensa-tion method to conduct error compensation for the positioning accuracy of linear motor. The test results indi-cate that the error compensation method is simple and feasible.