CAJ | 학술논문

用正硅酸惡酯、硝酸铝、硝酸钙、硝酸镁经化恘反愓，添加燃烧剂烧结后悁磨制成了超细玻璃粉原料；用水合三氯化钌高温脱水法制备了悦化钌粉原料；采用低温共烧(LTCC)制成了混有这两种原料的钌厚膜电阻。采用差热分析惖、激光粒度惖和扫描电子显微镜进行了分析表征。结果表明，制备的电阻浆料与 LTCC 生瓷烧结性能相匹配，稳定性好，温度系数在±200×10-6/℃惣内，制备的电阻器平均方阻为88.5?/□。
용정규산악지、초산려、초산개、초산미경화규반탕，첨가연소제소결후연마제성료초세파리분원료；용수합삼록화조고온탈수법제비료열화조분원료；채용저온공소(LTCC)제성료혼유저량충원료적조후막전조。채용차열분석척、격광립도척화소묘전자현미경진행료분석표정。결과표명，제비적전조장료여 LTCC 생자소결성능상필배，은정성호，온도계수재±200×10-6/℃총내，제비적전조기평균방조위88.5?/□。
The fine glass powders were prepared by chemical reaction of tetraethoxysilane, aluminum nitrate, calcium nitrate, and magnesium nitrate, followed by sintering with combustion agents and grinding to give a fine particle size suitable for making thick film resistor paste. Conductive powders RuO2 was prepared by dehydration of RuCl3·nH2O at high temperature. The glass powders, RuO2, were mixed to prepare thick film resistor under typical low temperature co-fired ceramic technology procedure. The DTA and size distribution of glass powders, the morphology and electrical properties of the resistor have been studied. The paste shows well sintering compatibility with LTCC green tape, the formed resistor exhibits good stability and its temperature coefficient of resistance is within the range of ±200 ppm/℃, andthe prepared resistors have an average sheet resistance of 88.5 ?/□.