CAJ | 학술논문

利用多弧离子镀技术在316L 不锈钢和单晶硅上沉积 CrCN 薄膜，通过X 射线衍射仪（XRD）、扫描电镜（SEM）、X射线光电子能谱仪（XPS）、纳米压痕仪、273A电化学工作站和多功能摩擦磨损试验机等对316L不锈钢及CrCN薄膜的微观结构、力学性能、耐腐蚀性能和摩擦学性能进行表征.结果表明：在316L不锈钢上沉积CrCN薄膜后，硬度从4 GPa提高到22 GPa，H/E和 H3/E2分别从0.022和0.002 GPa提高到0.071和0.11 GPa；阳极腐蚀电位从-0.21 V上升到-0.19 V；在大气，去离子水，海水环境下的摩擦系数及磨损率均显著降低，表现出较优异的综合性能.
이용다호리자도기술재316L 불수강화단정규상침적 CrCN 박막，통과X 사선연사의（XRD）、소묘전경（SEM）、X사선광전자능보의（XPS）、납미압흔의、273A전화학공작참화다공능마찰마손시험궤등대316L불수강급CrCN박막적미관결구、역학성능、내부식성능화마찰학성능진행표정.결과표명：재316L불수강상침적CrCN박막후，경도종4 GPa제고도22 GPa，H/E화 H3/E2분별종0.022화0.002 GPa제고도0.071화0.11 GPa；양겁부식전위종-0.21 V상승도-0.19 V；재대기，거리자수，해수배경하적마찰계수급마손솔균현저강저，표현출교우이적종합성능.
CrCN coating is deposited on 316L stainless steel and single crystal silicon by Multi-Arc ion plating technique. Microstructures, mechanical performance, corrosion resistance and tribological properties in ambient air, distilled water and seawater are systematically investigated by XRD, XPS, SEM, nano-indentation and ball-on-disc tribol-meter. The results show that hardness of CrCN coating, deposited on 316L stainless steel, increases from 4 GPa to 22 GPa, H/E and H3/E2 increased from 0.022 and 0.002 GPa to 0.071 and 0.11 GPa, relatively. The anode corrosion potential increases from-2.1 V to-1.9 V, the friction coefficient and wear ratio in ambient air, distilled water and seawater can all be significantly reduced. In other words, the coated 316L stainless steel shows a better comprehensive performance than uncoated one.