CAJ | 학술논문

采用100 kW 级直流电弧等离子喷射法进行金刚石膜沉积，阐述了氩气对维持电弧稳定的重要作用，讨论了氩气流量对衬底表面轰击的影响，氩气流量和不同电弧分区对形核期金刚石表面形貌和晶粒尺寸的影响，以及时间和不同预处理方式对金刚石形核密度的影响。结果表明：随着氩气流量的增加，氩气对衬底表面的轰击作用增强，金刚石膜表面形貌呈现从(111)到(100)的变化规律，金刚石晶粒尺寸减小，晶形变得不完整；弧边位置(100)取向更明显；使用金刚石微粒对衬底进行研磨预处理能显著提高金刚石的形核密度。
채용100 kW 급직류전호등리자분사법진행금강석막침적，천술료아기대유지전호은정적중요작용，토론료아기류량대츤저표면굉격적영향，아기류량화불동전호분구대형핵기금강석표면형모화정립척촌적영향，이급시간화불동예처리방식대금강석형핵밀도적영향。결과표명：수착아기류량적증가，아기대츤저표면적굉격작용증강，금강석막표면형모정현종(111)도(100)적변화규률，금강석정립척촌감소，정형변득불완정；호변위치(100)취향경명현；사용금강석미립대츤저진행연마예처리능현저제고금강석적형핵밀도。
The importance of Ar to keep arc stable was demonstrated in deposition of diamond films using DC arc plasma jet.The effects of Ar flow on bombardment to the surface of substrate were investigated.Meantime,effects of Ar flow,arc area and pretreatment method on diamond surface morphology,grain size during nucleation and diamond nucleation density fabricating were discussed. The results showed that due to enhanced bombardment effect of Ar on surface of substrate,the growth orientation of diamond morphology changed from (1 1 1)to (100)and the diamond grain size decreased and grain shape became imperfect with the increase of Ar flow.But the orientation of diamond (100) was more obvious at arc edge.The diamond nucleation density increased obviously by pre-grinding on the substrate with diamond particles.