CAJ | 학술논문

针对巨磁阻和磁隧道结等磁阻元件的1/f噪声，提出一种采用微机电系统的磁力线聚集和垂动调制磁场传感器。通过将被测磁场从低频转移到几kHz，实现对磁场的DC/AC转化，从而减小了磁阻元件的1/f噪声。基于该方案采用多层膜巨磁阻元件AA002制作了磁场传感器样品，并进行了实验测试，结果表明：磁传感器样品的调制效率达到了19．3％，超过了已有的其他各种调制方案，同时低频磁场的探测能力达到槡120pT/Hz，相比巨磁阻元件AA002提高了40多倍。
침대거자조화자수도결등자조원건적1/f조성，제출일충채용미궤전계통적자력선취집화수동조제자장전감기。통과장피측자장종저빈전이도궤kHz，실현대자장적DC/AC전화，종이감소료자조원건적1/f조성。기우해방안채용다층막거자조원건AA002제작료자장전감기양품，병진행료실험측시，결과표명：자전감기양품적조제효솔체도료19．3％，초과료이유적기타각충조제방안，동시저빈자장적탐측능력체도상120pT/Hz，상비거자조원건AA002제고료40다배。
1/f noise is one of the main noise sources of giant magnetoresistance (GMR)and magnetic tunnel junction (MTJ),which can cause intrinsic detection limit at low frequency.Based on this fact,a sort of magnetic field sensor using microelectromechanical system (MEMS) flux concentrator and flux vertical motion modulation is proposed.The frequency of the measurement magnetic field was shifted from low to kHz ranges,which realized the translation of measurement magnetic field from DC to AC,thus 1/f noise of magnetoresistance element was mitigated.A prototype sensor was fabricated using multi-layered GMR element AA002,and the test was done.The results showed that the modulation efficiency achieves the levle of 19.3%,which exceeds the efficiency of most existing sensors with other modulation schemes,and the low frequency magnetic detection ability is improved to 120pT/Hz,which is enhanced by 40 times compared with that of the GMR element AA002.