CAJ | 학술논문

设计了一种新型金属-多层绝缘介质-金属表面等离子波导结构，利用时域有限差分法对其传输特性进行数值分析。研究了有效折射率和传播长度与中间多层绝缘介质厚度之间的关系，并分析了金属层的角度对该波导结构中场分布的影响。结果表明：当光波从波导结构上方垂直入射时，电磁场被限制在多层介质中的高折射率区，实现了场的耦合传输。多层绝缘介质的厚度均为220 nm 时，正六边形金属层结构对应的波导结构的传输性能较为理想。该结构能够实现亚波长尺度的光限制，可以应用于光电子集成和传感器领域。
설계료일충신형금속-다층절연개질-금속표면등리자파도결구，이용시역유한차분법대기전수특성진행수치분석。연구료유효절사솔화전파장도여중간다층절연개질후도지간적관계，병분석료금속층적각도대해파도결구중장분포적영향。결과표명：당광파종파도결구상방수직입사시，전자장피한제재다층개질중적고절사솔구，실현료장적우합전수。다층절연개질적후도균위220 nm 시，정륙변형금속층결구대응적파도결구적전수성능교위이상。해결구능구실현아파장척도적광한제，가이응용우광전자집성화전감기영역。
A metal-multi-insulator-metal surface plasmon waveguide was proposed, and finite-difference time-domain method was employed to research the transmission property. The dependence of thickness of insulators on effective refractive index and propagation length were investigated. The effect of angle of metal layer on the field distribution in waveguide was also analyzed. The simulation results show that the electromagnetic field is confined in high index region and coupling transmission is realized as the light wave is normally incident. The transmission characteristic of waveguide with regular hexa-gon metal is relative well as the thickness of multi-insulator is 220 nm. This waveguide is able to complete the light confinement at subwavelength scale and applied in electronics integration and sensor.