空心阴极气流溅射法快速沉积具有高活性光催化作用的TiO2薄膜(下)
공심음겁기류천사법쾌속침적구유고활성광최화작용적TiO2박막(하)
High rate deposition of photocatalytic TiO2 films with high activity by hollow cathode gas-flow sputtering method
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