皖西学院学报
皖西學院學報
환서학원학보
JOURNAL OF WANXI UNIVERSITY
2014年
5期
59-62
,共4页
择优溅射%SRIM%溅射产额%合金
擇優濺射%SRIM%濺射產額%閤金
택우천사%SRIM%천사산액%합금
preferential sputtering%SRIM%sputtering yield%alloy
利用SRIM2013软件，分别模拟计算了3组合金靶材Fe-Cr、Cu-Ni和Au-Ag在氩离子入射时的溅射产额，根据计算结果得出3组合金均存在择优溅射现象，择优溅射与金属原子的表面结合能有关的结论。同时模拟了 Au-Ag合金的溅射产额随入射离子能量和合金成分的变化情况，并分析其择优溅射机制。
利用SRIM2013軟件，分彆模擬計算瞭3組閤金靶材Fe-Cr、Cu-Ni和Au-Ag在氬離子入射時的濺射產額，根據計算結果得齣3組閤金均存在擇優濺射現象，擇優濺射與金屬原子的錶麵結閤能有關的結論。同時模擬瞭 Au-Ag閤金的濺射產額隨入射離子能量和閤金成分的變化情況，併分析其擇優濺射機製。
이용SRIM2013연건，분별모의계산료3조합금파재Fe-Cr、Cu-Ni화Au-Ag재아리자입사시적천사산액，근거계산결과득출3조합금균존재택우천사현상，택우천사여금속원자적표면결합능유관적결론。동시모의료 Au-Ag합금적천사산액수입사리자능량화합금성분적변화정황，병분석기택우천사궤제。
By using the SRIM2013 software ,the sputtering yield of argon ion incidence of three groups of Fe-Cr ,Cu-Ni and Au-Ag alloy targets were calculated respectively .According to the calculation results there was preferential sputtering phenomenon in the three combinations of gold .Preferential sputtering was associated with the surface of metal atoms binding energy .The sputtering yield of Au-Ag alloy was calculated with the change of incident ion energy and alloy composition ,and the preferential sputtering mechanism w as analyzed .
