CAJ | 학술논문

为了准确测量空间3维电场，解决作用于电场传感器的电场各分量之间的耦合干扰问题，该文提出一种新型的基于共面去耦结构的空间3维电场探测方法。区别于在空间的X, Y, Z 3个方向上进行3维布置传统测量思路，该文提出采用3个不共线的平面分布电场敏感单元，利用电场耦合灵敏度矩阵实现电场3个正交分量的准确解调。采用3个基于微机电系统(MEMS)技术的振动微结构电场敏感单元成功制作出3维电场传感器样机。该文设计出一种可实现任意角度旋转的新的传感器夹具，并构建了3维电场测试标定系统。实验表明，该文研制的3维电场传感器可实现电场3个分量的准确测量，结构简单，消除了3个电场分量之间的耦合干扰，提高了测量精度。
위료준학측량공간3유전장，해결작용우전장전감기적전장각분량지간적우합간우문제，해문제출일충신형적기우공면거우결구적공간3유전장탐측방법。구별우재공간적X, Y, Z 3개방향상진행3유포치전통측량사로，해문제출채용3개불공선적평면분포전장민감단원，이용전장우합령민도구진실현전장3개정교분량적준학해조。채용3개기우미궤전계통(MEMS)기술적진동미결구전장민감단원성공제작출3유전장전감기양궤。해문설계출일충가실현임의각도선전적신적전감기협구，병구건료3유전장측시표정계통。실험표명，해문연제적3유전장전감기가실현전장3개분량적준학측량，결구간단，소제료3개전장분량지간적우합간우，제고료측량정도。
To deal with the issue of coupling between three components of electric field in measuring, this paper presents a new 3-D testing method based on coplanar decoupling structure. Different from the conventional testing method, which places sensing elements in three orthogonal directions of X, Y, Z, in the proposed method sensing elements are arranged un-collinearly in the same plane, and the demodulation of X, Y, Z components from three sensing elements is realized by utilizing an electric field coupling sensitivity matrix. A three dimensional electric field sample sensor is developed using MEMS chips as sensing elements. Furthermore, an innovative fixture is designed, which can realize the sensor rotation of any angle, and the corresponding calibration and testing system is built up. Experiments show that the proposed 3-D electric field sensor can realize the accurate measurement, and it has a simple structure. The coupling interferences among three electric field components are eliminated, which improves the measurement accuracy.