CAJ | 학술논문

采用JGP-450复合型高真空多靶磁控溅射设备制备(Nb1-x, Vx)N(x=0，0.08，0.12，0.16，0.19)复合膜。利用X射线衍射仪(XRD)、扫描电镜(SEM)、纳米压痕仪及摩擦磨损仪等对复合膜的微结构、力学性能与摩擦性能进行表征。结果表明：NbN薄膜的择优取向为(200)，在NbN薄膜中添加元素V后，薄膜的择优取向转变为(111)，但x增大到0.19时薄膜又呈(200)择优取向；随V元素含量增加，(Nb, V)N复合膜的硬度和弹性模量均先增大后减小，x=0.12时，显微硬度和弹性模量都达到最大，分别为26.88 GPa和328.24 GPa；随温度从室温升高到700℃，(Nb0.88, V0.12)N复合膜的摩擦因数逐渐降低。(Nb0.88, V0.12)N复合薄膜具有良好的综合性能。
채용JGP-450복합형고진공다파자공천사설비제비(Nb1-x, Vx)N(x=0，0.08，0.12，0.16，0.19)복합막。이용X사선연사의(XRD)、소묘전경(SEM)、납미압흔의급마찰마손의등대복합막적미결구、역학성능여마찰성능진행표정。결과표명：NbN박막적택우취향위(200)，재NbN박막중첨가원소V후，박막적택우취향전변위(111)，단x증대도0.19시박막우정(200)택우취향；수V원소함량증가，(Nb, V)N복합막적경도화탄성모량균선증대후감소，x=0.12시，현미경도화탄성모량도체도최대，분별위26.88 GPa화328.24 GPa；수온도종실온승고도700℃，(Nb0.88, V0.12)N복합막적마찰인수축점강저。(Nb0.88, V0.12)N복합박막구유량호적종합성능。
A series of N (Nb1-x, Vx)N(x=0, 0.08, 0.12, 0.16, 0.19) composite films with different V contents were synthesized by the JGP-450 high-vacuum multi-target magnetron sputtering technique. The microstructure, mechanical and friction properties were investigated by X-ray diffraction (XRD), scanning electron microcopy (SEM), nano-indentation, and CSM ball-on-disc tribometer analysis. The results indicate that the preferential orientation of films changes from (200) to (111) when adding V element to NbN composite films, and then changes to (200) again when the x is 0.19. With increasing V content, the microhardness and elastic modulus of the (Nb,V)N composite films show a up-down curve, reaching a maximum value of 26.88 GPa and 328.24 GPa when the x is 0.12. The friction coefficient of (Nb0.88, V0.12)N composite films decreases with the increase of testing temperature from room temperature to 700 ℃. The (Nb0.88, V0.12)N composite film owns excellent properties.