CAJ | 학술논문

采用脉冲激光沉积方法,在(001)LaAlO 3上沉积 CaBaCo2 O 5＋δ多晶薄膜,用 X 射线衍射(XRD)和透射电子显微镜(TEM)对基体和薄膜的微观结构进行观察,并探讨了薄膜的生长机制以及改善薄膜质量的可能工艺.结果表明,(1)LaAlO 3基体中存在位错、孪晶等缺陷,且孪晶类型以(100)楔形孪晶为主；(2)CaBaCo2 O 5＋δ薄膜为多晶薄膜,薄膜底部保留了薄膜生长过程中的初始晶粒结构,晶粒大小约5~8 nm,厚度约为5~7 nm.薄膜顶层的晶粒较大,约为11~16 nm.
채용맥충격광침적방법,재(001)LaAlO 3상침적 CaBaCo2 O 5＋δ다정박막,용 X 사선연사(XRD)화투사전자현미경(TEM)대기체화박막적미관결구진행관찰,병탐토료박막적생장궤제이급개선박막질량적가능공예.결과표명,(1)LaAlO 3기체중존재위착、련정등결함,차련정류형이(100)설형련정위주；(2)CaBaCo2 O 5＋δ박막위다정박막,박막저부보류료박막생장과정중적초시정립결구,정립대소약5~8 nm,후도약위5~7 nm.박막정층적정립교대,약위11~16 nm.
CaBaCo2 O 5 +δ thin films were deposited on (001 )LaAlO 3 substrates by pulsed laser deposition.The microstructures of the film and substrate were studied by X-ray diffraction (XRD)and of transmission electron microscopy (TEM).Results show that (1 )dislocations and twins appear in the LaAlO 3 substrates,and the (100)wedge-shaped twin was the main type;(2)CaBaCo2 O 5 +δ thin film was polycrystalline in nature,and the initial grain structure with a grain size of about 5-8 nm during growth was kept at the bottom of the film.While the grain size at the top of the film was larger,about 1 1-1 6 nm.Based on the observation results,a growth mechanism of the film was proposed.Possible processes to improve the film quality have also been discussed.