CAJ | 학술논문

对电子束蒸发方式镀制的 HfO2/SiO2反射膜采用大口径激光进行辐照，采用激光量热计测量了激光辐射前后的弱吸收值。实验发现HfO2/SiO2反射膜在分别采用1064 nm和532 nm的激光辐照前后薄膜吸收分别从5．4％和1．7％降低到1．4和1．2％。采用聚焦离子束技术分析了激光辐照后薄膜的损伤形态并探究了损伤原因，发现：薄膜在激光辐照下存在节瘤的地方容易出现薄膜损伤，具体表现为熔融、部分喷发、完全脱落3种形态，节瘤缺陷种子来源的差异是导致其损伤机理也存在着巨大差异的主要原因。同时这些节瘤缺陷种子来源也影响着激光预处理作用效果，激光预处理技术对于祛除位于基底上种子形成的节瘤是有效的，原因是激光辐射过后该节瘤进行了预喷发而不会对后续激光产生影响；而激光预处理技术对位于膜层中间的可能是镀膜过程中材料飞溅引起的缺陷是无效的，需要通过飞秒激光手段对该类节瘤进行祛除。
대전자속증발방식도제적 HfO2/SiO2반사막채용대구경격광진행복조，채용격광량열계측량료격광복사전후적약흡수치。실험발현HfO2/SiO2반사막재분별채용1064 nm화532 nm적격광복조전후박막흡수분별종5．4％화1．7％강저도1．4화1．2％。채용취초리자속기술분석료격광복조후박막적손상형태병탐구료손상원인，발현：박막재격광복조하존재절류적지방용역출현박막손상，구체표현위용융、부분분발、완전탈락3충형태，절류결함충자래원적차이시도치기손상궤리야존재착거대차이적주요원인。동시저사절류결함충자래원야영향착격광예처리작용효과，격광예처리기술대우거제위우기저상충자형성적절류시유효적，원인시격광복사과후해절류진행료예분발이불회대후속격광산생영향；이격광예처리기술대위우막층중간적가능시도막과정중재료비천인기적결함시무효적，수요통과비초격광수단대해류절류진행거제。
Large aperture laser was used to irradiated the HfO2/SiO2 reflectors ,which were e-vaporated from hafnia and silica by e-beam .Laser calorimeter was used to test the film absorp-tion before and after laser irradiation .The results show that film absorption decreased from 5 .4% ,1 .7% to 1 .4% ,1 .2% ,when the measurement wavelengths were 1 064 and 532 nm , respectively .Focused ion beam (FIB) was used to study the damage morphology after laser ir-radiation and to explore the cause of damage .The film where nodule existed was easily dam-aged ,and the damage morphology mainly presented melt ,partly erupted and absolutely fallen off .For the HfO2/SiO2 reflectors ,laser conditioning was effective to eject the nodules on sub-strate .It was result from the nodule residue not to affect the subsequent laser .In addition ,la-ser conditioning was not effective to the nodule in the film ,which may be from the material spatter in coating process .In this case ,other method can be used to get rid of the nodules .