CAJ | 학술논문

氧化铝陶瓷因其稳定的机械性能和高温鲁棒性得到了广泛的应用。文章以LC谐振电路为技术背景，提出了一种基于氧化铝陶瓷的电容式高温压力传感器，并通过厚膜集成工艺技术将一个定值电感与一个可变电容集成在氧化铝陶瓷基板上实现了传感器的制备。对传感器进行高温环境下的压力测试，实验结果表明：传感器能够完成600℃高温环境下1到5 bar范围内压力的原位测试，且在600℃高温环境下传感器的重复性误差，迟滞性误差和零点漂移分别为8.3％，5.05％和3.7％。
양화려도자인기은정적궤계성능화고온로봉성득도료엄범적응용。문장이LC해진전로위기술배경，제출료일충기우양화려도자적전용식고온압력전감기，병통과후막집성공예기술장일개정치전감여일개가변전용집성재양화려도자기판상실현료전감기적제비。대전감기진행고온배경하적압력측시，실험결과표명：전감기능구완성600℃고온배경하1도5 bar범위내압력적원위측시，차재600℃고온배경하전감기적중복성오차，지체성오차화영점표이분별위8.3％，5.05％화3.7％。
Alumina ceramic has wide applications with its stable mechanical toughness and high temperature robust-ness. In the technical background of LC resonance circuit,this paper presents a capacitance high temperature pres-sure sensor based on alumina ceramics.A fixed inductance and a varied capacitance were integrated on the ceramic substrate through the thick film integrated technology.The sensor was tested in high temperature and pressure envi-ronments,and the experimental results shown that:the sensor can complete the pressure situ test at 600 ℃in range of 1 to 5 bar,and the repeatability error,hysteresis error and zero drift of the sensor were approximately 8. 3%,5?05% and 3.7%,respectively.