CAJ | 학술논문

信息、生物、先进制造、航天航空等高科技领域的飞速发展对微/纳加工技术及工艺提出了全新的、苛刻的要求，亟待发展创新的微纳加工方法。基于摩擦诱导微纳米加工方法，利用自制的多点接触微纳米加工设备，在单晶硅表面制备了各种大面积织构，并研究了织构形状和间距对表面接触角的影响规律。结果表明，单晶硅表面织构的线间距越小，表面接触角越大；“#”型织构相对于线性织构表现出更好的疏水性能，最大可使单晶硅表面的接触角增大145%。此外，利用摩擦诱导加工方法获得的表面织构具有良好的稳定性。放置一个月后，单晶硅表面织构的接触角测量结果与新鲜制备样品的测量结果相比没有明显变化。因此，摩擦诱导选择性刻蚀提供了一种实现单晶硅表面大面积功能织构加工的新方法。
신식、생물、선진제조、항천항공등고과기영역적비속발전대미/납가공기술급공예제출료전신적、가각적요구，극대발전창신적미납가공방법。기우마찰유도미납미가공방법，이용자제적다점접촉미납미가공설비，재단정규표면제비료각충대면적직구，병연구료직구형상화간거대표면접촉각적영향규률。결과표명，단정규표면직구적선간거월소，표면접촉각월대；“#”형직구상대우선성직구표현출경호적소수성능，최대가사단정규표면적접촉각증대145%。차외，이용마찰유도가공방법획득적표면직구구유량호적은정성。방치일개월후，단정규표면직구적접촉각측량결과여신선제비양품적측량결과상비몰유명현변화。인차，마찰유도선택성각식제공료일충실현단정규표면대면적공능직구가공적신방법。
The rapid development of high-technology area, such as information, biology and advanced manufacturing, puts forward new and stringent requirements for micro/nano fabrication method. It is essential to develop new methods for the micro/nano fabrication on silicon surface at large scale. By using self-built micro/nano fabrication equipment, large-area textures with various shapes are fabricated on monocrystalline silicon surface based on friction-induced selective etching method. The effect of pattern shape and line space of textures on the contact angle of silicon surface is studied. The results show that the smaller the line space, the larger the contact angle of texture. #-shaped texture reveals better hydrophobic property than the linear texture, which can increase the contact angle of silicon surface as large as 145%. In addition, the textured surface shows a good stability. Even after fabrication for one month, almost no change is detected for the contact angle on textured silicon surface. Therefore, the friction-induced selective etching provides a new approach to realize the functional texture on monocrystalline silicon surface at large scale.