CAJ | 학술논문

Al2 O3工程陶瓷因高强度、高硬度、耐高温等优良特性被广泛应用于航空航天、国防工业、微电子工业等领域。验证了利用金刚石涂层刀具高速精密微细铣削Al2 O3工程陶瓷材料的可行性。通过小型高速微铣床对陶瓷工件进行全径铣削微沟槽正交试验，评价指标为加工后得到的表面粗糙度Ra 和 Rz 值，试验因素分别为主轴转速、进给速度和轴向切深，采用极差法分析了各因素对工件表面粗糙度的影响规律，利用多元线性回归的方法对数据进行分析，优化后得到了适合于Al2 O3工程陶瓷材料的微铣削加工工艺参数。
Al2 O3공정도자인고강도、고경도、내고온등우량특성피엄범응용우항공항천、국방공업、미전자공업등영역。험증료이용금강석도층도구고속정밀미세선삭Al2 O3공정도자재료적가행성。통과소형고속미선상대도자공건진행전경선삭미구조정교시험，평개지표위가공후득도적표면조조도Ra 화 Rz 치，시험인소분별위주축전속、진급속도화축향절심，채용겁차법분석료각인소대공건표면조조도적영향규률，이용다원선성회귀적방법대수거진행분석，우화후득도료괄합우Al2 O3공정도자재료적미선삭가공공예삼수。
Al2 O3 engineering ceramics have high strength, high hardness and high temperature resistance. Therefore, the materials are widely used in aerospace, defense industry, microelectronics industry and many other fields. Orthogonal experiments of high-speed micro-milling Al2 O3 engineering ceramics by machining full-diameter micro-grooves are made, and the feasibility of micro-milling Al2 O3 engineering ceramics with diamond coated tools is verified. In the experiments, evaluation indexes are surface roughness Ra and Rz values. Experimental factors are spindle speed, feed rate and axial depth of cut. Range analysis method is used to analyze the influences of different process parameters on the workpiece surface roughness values. The data is analyzed by multiple linear regression analysis method. Then optimized the process parameters and ob-tained a set of suitable parameters to micro-milling Al2 O3 engineering ceramics.