CAJ | 학술논문

设计一款机械噪声较小、灵敏度较高的双轴电容式加速度传感器，其具有4个水平检测单元，X、 Y轴向的检测单元各有两组，且水平对称，有效地消除了轴间的交叉干扰；结构中的保护限位装置避免了结构因加速度值过大而断裂失效和结构测量的不准确。该加速度敏感质量块的大小为3250μm ×3250μm ×5μm；栅型条的尺寸大小为1575μm ×35μm ×5μm；间距为35μm，利用Ansys软件对加速度传感器进行性能仿真，得出加速度传感器X和Y轴向的静态灵敏度为0.253μm/g；电容灵敏度为1.533 pF/g； X和Y轴向的谐振频率为949 Hz，阻尼比为0.83。
설계일관궤계조성교소、령민도교고적쌍축전용식가속도전감기，기구유4개수평검측단원，X、 Y축향적검측단원각유량조，차수평대칭，유효지소제료축간적교차간우；결구중적보호한위장치피면료결구인가속도치과대이단렬실효화결구측량적불준학。해가속도민감질량괴적대소위3250μm ×3250μm ×5μm；책형조적척촌대소위1575μm ×35μm ×5μm；간거위35μm，이용Ansys연건대가속도전감기진행성능방진，득출가속도전감기X화Y축향적정태령민도위0.253μm/g；전용령민도위1.533 pF/g； X화Y축향적해진빈솔위949 Hz，조니비위0.83。
This paper design a micro-mechanical biaxial capacitive acceleration sensor with high sensitivity and low mechanical noise .Both X and Y axial of the sensor have two groups of testing unit with symmetrical structure , which effectively solves the problem of Cross coupling between the axial direction and measurement error , and the structure of limiting device avoids the failure of structure due to large acceleration value .The size of sensor quality is 3 250 μm ×3 250 μm ×5 μm, and the size of grid structure is 1 575 μm ×35 μm ×5 μm.Simulation of the per-formance of acceleration sensor by the ANSYS shows that both X and Y axial static sensitivity of acceleration sensor is 0.253 μm/g; both X and Y axial capacitance sensitivity of acceleration sensor is 1.533 pF/g; and both X and Y ax-ial resonant frequency is 949 Hz with a damping ratio of 0.83 .The simulation results verify the feasibility of the de-sign.