CAJ | 학술논문

分析比较了激光光束质量的评价方法，采用衍射极限因子评价方法和焦平面阵列探测技术，设计并研制了强激光光束质量测量系统。该系统主要由多层介质膜反射分束镜、卡塞格伦式缩束器、聚焦透镜、焦平面阵列及数据处理器等组成，采用哈特曼夏克波前监测仪对多层介质膜反射分束镜的透射波前进行实时监测。结果表明，系统实现了对中红外、近红外和可见光波长的强激光光束质量实时在线测量，光束质量因子的测量不确定度均小于10％，性能稳定，能够用于实验测量。
분석비교료격광광속질량적평개방법，채용연사겁한인자평개방법화초평면진렬탐측기술，설계병연제료강격광광속질량측량계통。해계통주요유다층개질막반사분속경、잡새격륜식축속기、취초투경、초평면진렬급수거처리기등조성，채용합특만하극파전감측의대다층개질막반사분속경적투사파전진행실시감측。결과표명，계통실현료대중홍외、근홍외화가견광파장적강격광광속질량실시재선측량，광속질량인자적측량불학정도균소우10％，성능은정，능구용우실험측량。
General evaluation methods of laser beam quality are discussed.A quality meas-urement system for high power laser beams is designed and developed with focal plane array detection technology according to diffraction limit factor method.The system is mainly com-posed of a multi-layer dielectric film reflective beam splitter,a Casey Glenn beam compres-sor,a focusing lens,focal plane arrays,and data processors.The transmitted wavefront of the multi-layer dielectric reflective beam splitter and the wavefront of other optical compo-nents are detected with Hartmann-Shack wavefront monitor.The system has been used for on-line measurement of high power laser beams,and the results show that the system can re-alize on-line measurement of laser beams with mid-infrared,near-infrared and visible wave-length,and the measurement uncertainty is less than 10% (k=2).