CAJ | 학술논문

为了保留光纤点衍射干涉仪容易对准以及衍射光束易于控制的优点，同时又能实现大数值孔径（ NA）光学系统的检测，设计了一种新型的波面参考源（WRS），它保留了光纤点衍射和微孔点衍射的优点，可满足大NA极紫外光刻物镜系统波像差检测的要求。本文在分析各种误差的基础上，搭建了WRS原理光路并对WRS的系统误差标定算法进行详细的研究，得到WRS标定时旋转平台的角度公差为0.5°，跳径时偏离系数为0.5％。这一新型WRS误差分析及标定对于实现高精度的检测具有十分重要的意义，最终为实现WRS系统误差标定提供理论基础。
위료보류광섬점연사간섭의용역대준이급연사광속역우공제적우점，동시우능실현대수치공경（ NA）광학계통적검측，설계료일충신형적파면삼고원（WRS），타보류료광섬점연사화미공점연사적우점，가만족대NA겁자외광각물경계통파상차검측적요구。본문재분석각충오차적기출상，탑건료WRS원리광로병대WRS적계통오차표정산법진행상세적연구，득도WRS표정시선전평태적각도공차위0.5°，도경시편리계수위0.5％。저일신형WRS오차분석급표정대우실현고정도적검측구유십분중요적의의，최종위실현WRS계통오차표정제공이론기출。
To keep the advantages of fiber point diffraction interferometer which is easy to align and control the diffracted light, we design a new wavefront reference source (WRS).WRS can keep the advantages of fiber point diffraction interferometer and pin-hole point diffraction interferometer , and it also can be used to test the wavefront aberration of larger NA optical system for Extreme Ultraviolet Lithography ( EUVL ) .The analysis of error for this new WRS and calibration of the system error is very important for realizing a more accurate test of wavefront aberration .Based on the analysis of various errors , we study the calibration algorithm in detail , and obtain the tolerance of several WRS important components including that the angle tolerance of rotation stage is 0.5°and the deviation factor is 0.5%when rotation is away optical axis .