CAJ | 학술논문

为解决大口径太赫兹波探测系统束控元件加工精度差、效率低的难题，本文提出了一种利用LODTM数控光学加工机床进行SPDT（单点金刚石车削）制备太赫兹波束控元件的方法。该方法属于确定性加工范畴，通过使用单晶金刚石刀具进行超精密切削加工，可直接得到适用于太赫兹波段的高面形精度的反射及透射类元件。针对铝基金属材料进行了加工工艺实验，得到了口径Φ300mm的太赫兹雷达主反射镜；并利用精密坐标测量技术对主反射镜的面形精度进行检测，其检测结果优于设计指标。实验表明，基于LODTM确定性超精密加工得到的太赫兹波束控元件具有面形精度高、表面光洁度好等优点，可实现太赫兹波探测系统的高精度和低成本目标。
위해결대구경태혁자파탐측계통속공원건가공정도차、효솔저적난제，본문제출료일충이용LODTM수공광학가공궤상진행SPDT（단점금강석차삭）제비태혁자파속공원건적방법。해방법속우학정성가공범주，통과사용단정금강석도구진행초정밀절삭가공，가직접득도괄용우태혁자파단적고면형정도적반사급투사류원건。침대려기금속재료진행료가공공예실험，득도료구경Φ300mm적태혁자뢰체주반사경；병이용정밀좌표측량기술대주반사경적면형정도진행검측，기검측결과우우설계지표。실험표명，기우LODTM학정성초정밀가공득도적태혁자파속공원건구유면형정도고、표면광길도호등우점，가실현태혁자파탐측계통적고정도화저성본목표。
In order to improve the precision and efficiency of shading components in large aperture terahertz wave detecting system, a technique for processing terahertz wave shading components by SPDT (single point diamond turing) based on large optics diamond turning machine was presented. The single crystal diamond cutting tools for ultra-precision machining used by the technique, and the high-precision components were obtained. The components could be applied to the reflectors and lenses of terahertz waveband. An experiment for 2A12 aluminum had been done to demonstrate the availability of the technique. A terahertz radar main reflector in diameter of 300mm was obtained. The detection result for precision of the reflector by precision coordinate measuring technology was better than the design index.