激光技术
激光技術
격광기술
LASER TECHNOLOGY
2014年
6期
845-847
,共3页
测量与计量%薄膜%检测%光学相干层析成像
測量與計量%薄膜%檢測%光學相榦層析成像
측량여계량%박막%검측%광학상간층석성상
measurement and metrology%film%detection%optical coherence tomography
为了实现对氧化锌薄膜的厚度测量，采用光学相干层析成像的方法进行了理论分析和实验验证，获得了含厚度信息的1维深度图像和含内部结构信息的2维层析图像。结果表明，该方法测得的薄膜厚度值与理论值一致。该研究说明谱域光学相干层析成像技术的测量结果真实有效，可以用于薄膜的厚度测量和质量检测。
為瞭實現對氧化鋅薄膜的厚度測量，採用光學相榦層析成像的方法進行瞭理論分析和實驗驗證，穫得瞭含厚度信息的1維深度圖像和含內部結構信息的2維層析圖像。結果錶明，該方法測得的薄膜厚度值與理論值一緻。該研究說明譜域光學相榦層析成像技術的測量結果真實有效，可以用于薄膜的厚度測量和質量檢測。
위료실현대양화자박막적후도측량，채용광학상간층석성상적방법진행료이론분석화실험험증，획득료함후도신식적1유심도도상화함내부결구신식적2유층석도상。결과표명，해방법측득적박막후도치여이론치일치。해연구설명보역광학상간층석성상기술적측량결과진실유효，가이용우박막적후도측량화질량검측。
In order to measure the thickness of ZnO film , optical coherence tomography ( OCT) technique was used for theoretic analysis and experimental verification .The 1-D depth image including thickness information and the 2-D cross-sectional image including structure information were obtained simultaneously .The results show that the measuring result is almost as same as the theoretical value .It is illustrated that the measurement of the spectral-domain OCT is real and effective.It can be used for the measurement of thickness and quality of the film .
