CAJ | 학술논문

在研究电容式微机械陀螺信号通路工作原理的基础上,分析了影响电容式读出电路精度的各种非理想因素并进行了量化计算,设计了一款低噪声电容读出电路。该芯片采用高频调制原理实现了低频噪声的转移,同时提出了一款具有高电源抑制比的低噪声运算放大器,采用连续时间的电容读出方法研制了微机械陀螺ASIC电路。该芯片采用0.5μm CMOS工艺,芯片面积为3.5mm×3.4 mm,测试结果表明,该单片ASIC的输出级噪底为-117 dB,当陀螺仪量程为±300°/s时,分辨率可以达到0.00035°/s。
재연구전용식미궤계타라신호통로공작원리적기출상,분석료영향전용식독출전로정도적각충비이상인소병진행료양화계산,설계료일관저조성전용독출전로。해심편채용고빈조제원리실현료저빈조성적전이,동시제출료일관구유고전원억제비적저조성운산방대기,채용련속시간적전용독출방법연제료미궤계타라ASIC전로。해심편채용0.5μm CMOS공예,심편면적위3.5mm×3.4 mm,측시결과표명,해단편ASIC적수출급조저위-117 dB,당타라의량정위±300°/s시,분변솔가이체도0.00035°/s。
Based on the analysis of capacitive vibratory microgyroscope’s interface circuit a low noise capacitive read-out circuit is presented. All kinds of non-ideal factors are discussed. A high power supply rejection ratio of a low-noise amplifier based on continuous time capacitance-to-voltage technique is presented in this paper. Using high frequency modulation principle,the circuit can improve the resolution and dynamic range by canceling 1/f noise. This ASIC is designed and manufactured based on 0.5μm analog CMOS process. The chip size is 3.5 mm×3.4 mm. Measurement shows that the capacitive readout circuit noise floor is-117.14 dB,When the gyro range is ±300 °/s,resolution can be achieved 0.00035 °/s.