CAJ | 학술논문

为了适应太阳能电池生产的新工艺需求，提出一种新型的软着陆闭管扩散炉系统，为扩散炉系统向智能型、精密型的方向发展进行有益的探索，并阐述了软着陆闭管扩散炉系统的结构组成和工艺原理以及技术指标，重点对扩散炉系统中送料装置软着陆单元、炉门自动封闭单元以及炉管压力平衡单元的电气控制部分进行了详细的分析，其中运用了上下位机与PLC 结合的控制方式对送料装置软着陆、炉门自动封闭进行了设计，运用PID 控制方式对炉膛内压力进行控制，使其达到平衡。
위료괄응태양능전지생산적신공예수구，제출일충신형적연착륙폐관확산로계통，위확산로계통향지능형、정밀형적방향발전진행유익적탐색，병천술료연착륙폐관확산로계통적결구조성화공예원리이급기술지표，중점대확산로계통중송료장치연착륙단원、로문자동봉폐단원이급로관압력평형단원적전기공제부분진행료상세적분석，기중운용료상하위궤여PLC 결합적공제방식대송료장치연착륙、로문자동봉폐진행료설계，운용PID 공제방식대로당내압력진행공제，사기체도평형。
In order to adjust the new technically requirem ent in solar battery m anufacture, a new soft landing closed tube diffusion system should be proposed as a beneficial exploration for diffusion system to the developm ent direction of intelligence and precision. In this article, the first part explain the structure, technical principle and technical index of this system , and som e detailed analysis on electric control system of soft landing unit in loading and unloading system , tube door autom atic seal off unit and tube pressure balance unit also w ill be described. In this design, the com bination of upper com puter,low er com puter and PLC is used to controlthe softlanding loading-unloading system and tube door autom atic seal off system . In order to balance tube pressure, the pressure is controlled by PID controlsystem .