CAJ | 학술논문

泡生法生长蓝宝石单晶过程中，晶体常出现开裂、气泡等缺陷．本文通过Ansys有限元软件对热场结构和晶体生长过程进行数值模拟仿真，仿真分析结果表明热场隔热屏层数的多少直接影响热场温度梯度分布．为此，本文以仿真结果为基础，结合实际生产经验对单晶生长设备进行相应的热场改造，并进行单晶生长实验验证，验证结果显示改进设备生长蓝宝石单晶体位错密度均值减少76/cm2，掏棒长度均值增加118 mm．
포생법생장람보석단정과정중，정체상출현개렬、기포등결함．본문통과Ansys유한원연건대열장결구화정체생장과정진행수치모의방진，방진분석결과표명열장격열병층수적다소직접영향열장온도제도분포．위차，본문이방진결과위기출，결합실제생산경험대단정생장설비진행상응적열장개조，병진행단정생장실험험증，험증결과현시개진설비생장람보석단정체위착밀도균치감소76/cm2，도봉장도균치증가118 mm．
In the process of single sapphire crystal growth in Kyropoulos,the crystal defects often appear such as cracking and bubbles.In this paper,Ansys software is used for numerical simulation of the thermal field struc-ture and crystal growth process.The results show that the number of shield layers of thermal field directly affects the temperature of the thermal field gradient distribution.Based on the simulation results as well as actual pro-duction experience,the thermal field of single crystal growth equipment is modified accordingly.The results of crystal growth experiment verificationshow that the dislocation density of the sapphire single crystal in the im-proved equipment reduces 76 /cm2,and dig rod length increases 118 mm.