CAJ | 학술논문

响应曲面法（Response Surface Methodology）是数学方法和统计方法相结合的产物，是用来对所感兴趣的问题进行建模和分析的一种方法。其利用合理的实验设计方法并通过实验得到一定数据，采用复合中心来拟合因素与响应值之间的预测模型，通过对模型的分析来寻求最优设计参数和流程的最佳操作设置，从而解决多变量的实验问题。该方法可应用在VDMOS功率器件设计中，可以使VDMOS设计人员更加直观地从多个复杂的设计参数匹配中寻找到最有价值的匹配，大大方便了VDMOS设计人员。同时，该方法也可以大大降低器件设计及生产过程中的时间和成本。
향응곡면법（Response Surface Methodology）시수학방법화통계방법상결합적산물，시용래대소감흥취적문제진행건모화분석적일충방법。기이용합리적실험설계방법병통과실험득도일정수거，채용복합중심래의합인소여향응치지간적예측모형，통과대모형적분석래심구최우설계삼수화류정적최가조작설치，종이해결다변량적실험문제。해방법가응용재VDMOS공솔기건설계중，가이사VDMOS설계인원경가직관지종다개복잡적설계삼수필배중심조도최유개치적필배，대대방편료VDMOS설계인원。동시，해방법야가이대대강저기건설계급생산과정중적시간화성본。
Response surface methodology is based on the mathematical methods and statistical methods, and which using reasonable experimental design methods and getting some data from experiments, using a composite center to fit the forecasting model between the factors and response, based on the analysis of the model to find the best optimal design parameters and operating process settings, to solve the experiments which have the multivariate problem. This method can be applied in the design of VDMOS power device, the designer can intuitive find the most valuable match from a number of complex design parameters, it is very convenient for VDMOS designer. And at the same time, this method can greatly reduce the cost and process time of the device.