CAJ | 학술논문

为了满足散射计数字处理系统在多通道采样后的数据处理的要求，提出了一种高精度的多通道ADC一致性测量方法。对多通道ADC的幅度一致性、直流偏置一致性和延迟一致性3个重要指标进行了定量分析，并通过开展实验完成了实测数据的采集和分析。实际应用表明，这种测量方法可靠有效，能够为后期误差分析和矫正提供重要的参考依据。
위료만족산사계수자처리계통재다통도채양후적수거처리적요구，제출료일충고정도적다통도ADC일치성측량방법。대다통도ADC적폭도일치성、직류편치일치성화연지일치성3개중요지표진행료정량분석，병통과개전실험완성료실측수거적채집화분석。실제응용표명，저충측량방법가고유효，능구위후기오차분석화교정제공중요적삼고의거。
In order to satisfy the requirement of data processing in multichannel sampling circuit of scatterometer, a high-precision measurement is designed to measure the consistency of multichannel ADC in this paper. This paper provided the quantitative analysis of amplitudes gain consistency, the consistency of DC bias consistency and the consistency of sample delay consistency precisely. This paper collected a large amount of data to analyze the consistency by experiment. The experiment and application show that this measuring method is accurate. And it can provide reference for the data error correction.