CAJ | 학술논문

研究了离子镀膜法制备铀薄膜的性质,可为改善薄膜性能、完善过程模型、优化制备参数和提高制备效率提供依据。本工作通过扫描电子显微镜和 X射线衍射分别测量了离子镀膜法制备铀薄膜的表面形貌和物相结构,通过俄歇电子能谱和 X射线光电子能谱结合 Ar+溅射深度剖析,对离子镀膜法制备铀薄膜的元素成分、化学形态及纵深方向的分布进行了分析。分析结果表明：制备的铀薄膜在基体上分布连续,主要物相为CaF2类型面心结构 UO2,主要形态为 UO2、金属 U和 FeUO4化合物。
연구료리자도막법제비유박막적성질,가위개선박막성능、완선과정모형、우화제비삼수화제고제비효솔제공의거。본공작통과소묘전자현미경화 X사선연사분별측량료리자도막법제비유박막적표면형모화물상결구,통과아헐전자능보화 X사선광전자능보결합 Ar+천사심도부석,대리자도막법제비유박막적원소성분、화학형태급종심방향적분포진행료분석。분석결과표명：제비적유박막재기체상분포련속,주요물상위CaF2류형면심결구 UO2,주요형태위 UO2、금속 U화 FeUO4화합물。
Uranium thin film prepared by ion plating was characterized on aspects of val-ances,components,morphology and compact texture,with X-ray photoelectron spectrosco-py (XPS),Auger electron spectroscopy (AES),scanning electron microscopy (SEM)and X-ray diffraction (XRD).The results indicate that uranium thin film on the stainless steel matrix is continuous and consists of UO2 ,metal U and FeUO4 .The analysis also reveals that the crystal structure of thin film is a face-centered cubic.