CAJ | 학술논문

空间光调制器是一类能将信息加载于光学数据场上以便对二维空间各点光强进行调制的器件，其在微光刻领域具有广泛应用。微光刻技术对于照明强度分布、均匀性等的高精确度要求，使得基于数字微镜元件的空间光调制器由于精度高、可控性好而逐渐受到青睐，成为微光刻系统不可缺少的组成元件。
공간광조제기시일류능장신식가재우광학수거장상이편대이유공간각점광강진행조제적기건，기재미광각영역구유엄범응용。미광각기술대우조명강도분포、균균성등적고정학도요구，사득기우수자미경원건적공간광조제기유우정도고、가공성호이축점수도청래，성위미광각계통불가결소적조성원건。
SLM ( spatial light modulator) is a kind of devices which can upload information to an optical data field, therefore modulating the light intensity of each point of the 2-dimentional space. It is widely used in the field of microlithography. As for the high demand for the accuracy of il umination intensity and uniformity etc. of the microlithography technology, SLM based on DMD( digital micro mirror) is welcomed because of its high accuracy and control ability, therefore becoming essential part of microlithography system.