CAJ | 학술논문

为了促进微机电系统封装技术的发展,设计了应用聚氧化乙烯(polyethylene oxide,PEO)作为主体材料,通过掺杂不同的锂盐获得聚合物固体电解质用于阳极键合进行封装。阳极键合对材料的要求主要是具有离子导电性,因此采用 X 射线小角衍射(small-angle X-ray scattering, SAXS)和傅里叶红外光谱( Fouriex transform infrared radiation spectroscopy, FTIR)对设计的高分子固体电解质的导电机理进行分析。研究结果表明：LiClO4的离解能更小；锂离子的迁移数更多；随着其质量分数的增加,电导率更高；通过键合结果发现,PEO-LiClO4和金属铝键合界面过渡层的产生是两者得以焊合的关键。
위료촉진미궤전계통봉장기술적발전,설계료응용취양화을희(polyethylene oxide,PEO)작위주체재료,통과참잡불동적리염획득취합물고체전해질용우양겁건합진행봉장。양겁건합대재료적요구주요시구유리자도전성,인차채용 X 사선소각연사(small-angle X-ray scattering, SAXS)화부리협홍외광보( Fouriex transform infrared radiation spectroscopy, FTIR)대설계적고분자고체전해질적도전궤리진행분석。연구결과표명：LiClO4적리해능경소；리리자적천이수경다；수착기질량분수적증가,전도솔경고；통과건합결과발현,PEO-LiClO4화금속려건합계면과도층적산생시량자득이한합적관건。
To promote the development of micro-electro-mechanical system packaging technology, design the application of polyethylene oxide(PEO) as the main material, different lithium were doped into PEO to obtain polymer solid electrolyte material for anodic bonding package. Anodic bonding requirements of the material are mainly with ionic conductivity; therefore, small-angle X-ray scattering ( SAXS) and Fourier transform infrared radiation spectroscopy (FTIR) are used to analyze conductive mechanism of polymer solid electrolyte material. Results show that: dissociation energy of LiClO4 is small; the transport number of lithium ions is more; with the increase of the content, the electrical conductivity increases. Bonding shows that PEO-LiClO4 and aluminum bonding interface between the transition layers is the key to bond together.