CAJ | 학술논문

本文设计了一种不需闪烁体或增感屏，直接对X射线进行探测成像的线阵图像传感器，对其电荷收集进行了理论分析，设计了辐射加固的光敏元结构。采用0.5μm DPT M CM OS工艺，针对单个像元内含不同个数光敏元的结构进行了流片和X射线实验测试。测试结果表明：该图像传感器暗信号电压约为1V，随像元内光敏元个数的增加暗信号电压增大；饱和输出电压为2.4V ；随光敏元个数的增加，电荷收集总量增加，总寄生电容也同时增加，所设计的单个像元含3个光敏元的结构能得到相对更大的有效输出电压。
본문설계료일충불수섬삭체혹증감병，직접대X사선진행탐측성상적선진도상전감기，대기전하수집진행료이론분석，설계료복사가고적광민원결구。채용0.5μm DPT M CM OS공예，침대단개상원내함불동개수광민원적결구진행료류편화X사선실험측시。측시결과표명：해도상전감기암신호전압약위1V，수상원내광민원개수적증가암신호전압증대；포화수출전압위2.4V ；수광민원개수적증가，전하수집총량증가，총기생전용야동시증가，소설계적단개상원함3개광민원적결구능득도상대경대적유효수출전압。
A CMOS image sensor for direct X-ray imaging without scintillator was designed .The charge collecting mechanism was theoretically analyzed ,and radiation-hardened structure for its sensitive element was designed .The line array with different sensitive elements in pixel was taped out in 0.5 μm DPTM standard CMOS technology and tested by X-ray .The experiment results show that the dark signal output voltage of the line array is about 1 V ,and saturated output voltage is 2.4 V .T he collected charge and parasitic capacitor increase with sensitive elements .Three sensitive elements in one pixel can achieve higher effective output .