CAJ | 학술논문

光学工件研磨后亚表面损伤层深度是确定其抛光加工余量的重要依据。采用三种典型的光学材料亚表面损伤层深度测量方法(BOE 分步腐蚀法、BOE 差动腐蚀法、磁流变抛光斑点法),测量比较了固结磨料研抛垫(FAP)研磨后 K9玻璃的亚表面损伤层厚度；建立了亚表面损伤模型,分析比较测量误差产生的原因。结果表明：在实验条件下,BOE 分步腐蚀法测量精度优于其他两种方法；BOE 分步腐蚀法、磁流变抛光斑点法、BOE 差动腐蚀法的测量精度分别约为0.1 nm、17 nm、200 nm；亚表面损伤层总深度与其裂纹深度之间存在对数关系。
광학공건연마후아표면손상층심도시학정기포광가공여량적중요의거。채용삼충전형적광학재료아표면손상층심도측량방법(BOE 분보부식법、BOE 차동부식법、자류변포광반점법),측량비교료고결마료연포점(FAP)연마후 K9파리적아표면손상층후도；건립료아표면손상모형,분석비교측량오차산생적원인。결과표명：재실험조건하,BOE 분보부식법측량정도우우기타량충방법；BOE 분보부식법、자류변포광반점법、BOE 차동부식법적측량정도분별약위0.1 nm、17 nm、200 nm；아표면손상층총심도여기렬문심도지간존재대수관계。
The subsurface damage SSD depth of lapped optical parts is the important basis to determine the polishing allowance There are three kinds of typical measurement methods to measure the SSD depth of optical glass buffer oxide etch BOE step-by-step etching method BOE differential etching method magnetorheological polishing spot method Measuring and comparing the SSD depth of K9 glass lapped by fixed abrasive polishing pad FAP then building the model of SSD depth and exploring the connection between the surface crack layer depth with the damage layer depth of the material subsurface analyzing and comparing the causes of measurement error The results show that under the experimental conditions the accuracy measured by BOE step-by-step corrosion method is better than the ones measured by the other two methods the measuring accuracy of BOE step-by-step corrosion method the magnetic rheological polishing spot method and BOE differential corrosion method respectively are about 0 1 nm 17 nm and 200 nm There is a logarithmic relationship between the total depth of the subsurface damage layer and the crack depth.