CAJ | 학술논문

晶圆制造的加工工艺日趋复杂，组合设备加工模块中存在严格的逗留时间约束以及频繁的故障，因此研究其生产调度，排除出现的故障成为至关重要的问题。通过分析双臂组合设备的并行模块及其加工流程模式，建立能够描述系统的稳态特性的Petri Net模型。基于该模型，当双臂组合设备并行模块出现故障时，分析系统的可调度性，对可调度情况提出有效的运行控制策略，使得晶圆不违反严格的逗留时间约束。最后通过实例验证该控制策略的可行性。
정원제조적가공공예일추복잡，조합설비가공모괴중존재엄격적두류시간약속이급빈번적고장，인차연구기생산조도，배제출현적고장성위지관중요적문제。통과분석쌍비조합설비적병행모괴급기가공류정모식，건립능구묘술계통적은태특성적Petri Net모형。기우해모형，당쌍비조합설비병행모괴출현고장시，분석계통적가조도성，대가조도정황제출유효적운행공제책략，사득정원불위반엄격적두류시간약속。최후통과실례험증해공제책략적가행성。
Since there are many sojourn time constraints and failure in the processing module of cluster tools in semiconductor industry, processing technology for wafer manufacturing becomes more and more complicated. Thus, it is extremely important to study schedule feasibility to eliminating the failures in manufacturing process. This paper analyzed the processing flows of the parallel module for a cluster tool with a dual-arms robot,and developed a Petri Net model for this cluster tool that can describe the steady state characteristics of the whole system. With this PN model, if there are failures appearing in parallel modules, it can analyze the schedule conditions and feasibility, and propose some effective control strategies for different failures’ conditions such that these strategies can satisfy wafer sojourn time constraints at the same time. Finally,we illustrate the proposed analysis and method through several examples.