CAJ | 학술논문

为了降低基于MEMS（micro-electro-mechanical systems）微镜的傅里叶变换光谱探测系统复原光谱仪的畸变，提高复原光谱的质量，减小系统相位误差的影响，提出了一种系统相位误差的修正方法。首先分析了基于M EM S微镜的傅里叶变换光谱探测系统中相位误差的主要来源，分析结果表明：该新型傅里叶变换光谱探测系统的相位误差来源于光程差的零点漂移，该相位误差可以通过改进该系统干涉仪的结构引入过零采样并利用Mertz乘积法进行修正。搭建了光谱探测系统的实验平台，对该相位误差校正方法进行了实验验证，实验结果表明：采用了改进干涉仪并利用Mertz乘积法校正误差后的光谱探测系统所测得的复原光谱质量得到明显改善，去除了原复原谱畸变产生的负峰，且旁瓣得到明显抑制。该相位误差校正方法能够很好的降低相位误差对系统性能的影响，能够有效地提高系统的光谱探测性能。在提出的基于M EM S微镜的新型傅里叶变换光谱探测系统的基础上，分析了该系统相位误差的来源，提出了一种系统相位误差的修正方法，提高了系统的光谱探测性能。
위료강저기우MEMS（micro-electro-mechanical systems）미경적부리협변환광보탐측계통복원광보의적기변，제고복원광보적질량，감소계통상위오차적영향，제출료일충계통상위오차적수정방법。수선분석료기우M EM S미경적부리협변환광보탐측계통중상위오차적주요래원，분석결과표명：해신형부리협변환광보탐측계통적상위오차래원우광정차적영점표이，해상위오차가이통과개진해계통간섭의적결구인입과령채양병이용Mertz승적법진행수정。탑건료광보탐측계통적실험평태，대해상위오차교정방법진행료실험험증，실험결과표명：채용료개진간섭의병이용Mertz승적법교정오차후적광보탐측계통소측득적복원광보질량득도명현개선，거제료원복원보기변산생적부봉，차방판득도명현억제。해상위오차교정방법능구흔호적강저상위오차대계통성능적영향，능구유효지제고계통적광보탐측성능。재제출적기우M EM S미경적신형부리협변환광보탐측계통적기출상，분석료해계통상위오차적래원，제출료일충계통상위오차적수정방법，제고료계통적광보탐측성능。
To decrease the distortion of the recovered spectrum ,improve the quantity of the recovered spectrum and decrease the influence of the phase error of the new spectrum detection system based on MEMS (micro-electro-mechanical systems) micro-mirrors ,a new phase error correction method for this system is proposed in the present paper .The source of phase error of the spectrum detection system based on MEMS micro-mirrors is analyzed firstly .The analyzed result indicated that the phase error of the new spectral Fourier transform detection system is the zero drift of the optical path difference ,and the phase error can be corrected by Zero-crossing sampling which is realized by improving the structure of the interferometer system and Mertz product . The spectrum detection system is set up and the phase error correction method is verified by this system .The experiment result is show that the quantity of the recovered spectrum of the spectrum detection is improved obviously by using the improved inter-ferometer system and Mertz product ,and the recovered spectrum has no negative peaks and the side lobes is suppressed marked-ly .This correction method can reduce the influence caused by phase error to the system performance well and improve the spec-tral detection performance effectively .In this paper ,the origin of the system phase error based on the new MEMS micromirror Fourier transform spectroscopy detection system is analyzed ,and the phase error correction method is proposed .This method can improve the performance of the spectrum detection system .