CAJ | 학술논문

气体静压节流器的变形量一般在微纳米级，难以采用实验的方法测得。对自主设计的多微通道式气体静压节流器，利用ANSYS软件对其受温度效应的影响进行研究。采用流固耦合分析方法，对供气温度和环境温度均为20℃，供气压强为（0.2～0.6）MPa，气膜厚度为10μm、20μm、30μm、40μm时节流器的温度分布及变形量进行仿真分析。研究结果表明：供气压强越大，气膜厚度越小，温度效应越明显，节流器内部温度和压强的降低引起的节流器变形越大。而温度变化对节流器的影响要明显强于压强变化对节流器的影响。其中，温降引起的最大变形量为1.0116μm，而压降引起的最大变形量为0.1289μm。
기체정압절류기적변형량일반재미납미급，난이채용실험적방법측득。대자주설계적다미통도식기체정압절류기，이용ANSYS연건대기수온도효응적영향진행연구。채용류고우합분석방법，대공기온도화배경온도균위20℃，공기압강위（0.2～0.6）MPa，기막후도위10μm、20μm、30μm、40μm시절류기적온도분포급변형량진행방진분석。연구결과표명：공기압강월대，기막후도월소，온도효응월명현，절류기내부온도화압강적강저인기적절류기변형월대。이온도변화대절류기적영향요명현강우압강변화대절류기적영향。기중，온강인기적최대변형량위1.0116μm，이압강인기적최대변형량위0.1289μm。
As the deformation of aerostatic restrictor is generally in the micro-nano level,it cannot be measured by experiment. On self-designed multi-channel restrictor,temperature effects are studied using ANSYS software. By using fluid solid coupling analysis method,the temperature distribution and deformation of the restrictor were analyzed with simulation when the supply air temperature and ambient temperature were all at 20 ℃,gas supply pressure was (0.2 ~ 0.6)MPa and gas film thickness was 10 μm,20 μm, 30 μm and 40 μm. Study results show that by increasing the supply pressure and decreasing the film thickness,the temperature effect is more obvious,and deformation of restrictor is larger caused by decreasing of internal temperature and pressure of the restrictor. Mo-reover the thermal deformation is bigger than deformation caused by pressure drop. Among which,the maximum deformation is 1.011 6 μm caused by temperature decreasing,and the maximum deformation caused by pressure drop is 0.128 9 μm.