CAJ | 학술논문

硅微谐振加速度计因具有小体积优势和高精度潜力，成为硅微惯性传感器研制的热点之一。高精度相位闭环控制系统是决定硅微谐振加速度计精度水平的重要因素。在分析硅微谐振加速度计工作机理的基础上，从闭环控制系统设计的角度，分析了相位闭环控制回路的原理，提出了一种可以消除匀加速误差的高精度三阶无静差相位闭环控制方案。给出了设计思路，研究了环路性能测试方法，讨论了闭环系统相位误差的来源与抑制方法。所设计的闭环回路在0.1 Hz处静态增益为170 dB，启动时间小于20 ms，实测带宽为432 Hz，全温范围内相位闭环回路相差变化0.84°，系统参数满足设计指标。
규미해진가속도계인구유소체적우세화고정도잠력，성위규미관성전감기연제적열점지일。고정도상위폐배공제계통시결정규미해진가속도계정도수평적중요인소。재분석규미해진가속도계공작궤리적기출상，종폐배공제계통설계적각도，분석료상위폐배공제회로적원리，제출료일충가이소제균가속오차적고정도삼계무정차상위폐배공제방안。급출료설계사로，연구료배로성능측시방법，토론료폐배계통상위오차적래원여억제방법。소설계적폐배회로재0.1 Hz처정태증익위170 dB，계동시간소우20 ms，실측대관위432 Hz，전온범위내상위폐배회로상차변화0.84°，계통삼수만족설계지표。
The silicon resonant accelerometer (SRA) is one of research hotspots of inertial instrument due to its small volume and potential of high precision. The closed-loop control is one of the important ways to improve the performance of the SRA. Based on the analysis of the working principle of the SRA, this paper presents a closed-loop control scheme for high-precision three-order zero static-error phase to eliminate the acceleration error. The technology for testing the performance of the closed-loop system is researched, and the phase error source and the depressing solution are discussed. The simulated static gain of the open-loop frequency response is 170 dB at 0.1 Hz, and the setup time is within 20 ms. The experiments shows that the bandwidth and the temperature error of phase closed-loop system is 432 Hz and 0.84° respectively. The test results prove that the closed-loop designed can meet the design specifications.